China's largest chipmaker testing first homegrown immersion DUV litho tool

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Article URL: https://www.tomshardware.com/tech-industry/semiconductors/chinas-largest-foundry-testing-first-domestic-immersion-duv-lithography-tool-smic-takes-significant-step-on-road-to-wafer-fab-equipment-self-sufficiency

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September 18, 2025

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